Manufacturing method of pixel structure of thin film transistor liquid crystal display

Abstract

A method of fabricating a pixel structure of TFT LCD is provided. First, a gate pattern, pixel electrode pattern, gate isolating layer and semiconductor layer are formed over the substrate sequentially. Then, a patterning process is performed to remove the first metal layer over the pixel electrode pattern, wherein the gate isolating layer and semiconductor layer are retained over the gate pattern. Next, a source pattern and drain pattern are sequentially formed over the substrate, and then a passivation layer and photoresist layer are formed over the substrate. Thereafter, a back side exposure process and a patterning process are performed by using the gate pattern, source pattern and drain pattern as mask to pattern the photoresist layer. Thereafter, the passivation layer is etched by using the patterned photoresist layer as mask to expose the transparent conductive layer of the pixel electrode pattern. Finally, the photoresist layer is removed.