The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2006
Filed:
Dec. 16, 2002
Felix J. Schuda, Saratoga, CA (US);
Felix J. Schuda, Saratoga, CA (US);
CyberOptics Semiconductor, Inc., Portland, OR (US);
Abstract
An improved laser-based wafer carrier mapping sensor is provided. The sensor includes a number of improvements including laser source improvements; optical improvements; and detector improvements. Laser source improvements include the type of laser sources used as well as the specification of size and power of such sources. Optical improvements include features that intentionally defocus the laser stripe on the wafer as well as additional features that help ensure precision stripe generation. Detector improvements include increasing gain while decreasing the effects of ambient light. Various combinations of these features provide additional synergies that facilitate the construction of a sensor with significantly improved dynamic response while decreasing the frequency of false cross slot errors.