The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2006
Filed:
Apr. 21, 2004
Eller Y. Juco, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Talex Sajoto, San Jose, CA (US);
Eller Y. Juco, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Talex Sajoto, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate processing system is provided with a processing chamber, an alternating voltage supply, and an impedance matching network. The processing chamber holds a substrate during processing and the alternating voltage supply is connected with the processing chamber to capacitively couple energy to a plasma formed within the processing chamber. The impedance matching network is coupled with the alternating voltage supply and has a variable resistive element and a variable reactive element, whose states respectively define distinct real and imaginary parts of an impedance.