The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Apr. 04, 2005
Keiichi Akagawa, Kamakura, JP;
Yoshihiko Suzuki, Funabashi, JP;
Katsuhiko Kurumada, Tokyo, JP;
Toshiaki Tamamura, Tokyo, JP;
Masatoshi Kanaya, Tokyo, JP;
Keiichi Akagawa, Kamakura, JP;
Yoshihiko Suzuki, Funabashi, JP;
Katsuhiko Kurumada, Tokyo, JP;
Toshiaki Tamamura, Tokyo, JP;
Masatoshi Kanaya, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
NTT Electronics Corporation, Tokyo, JP;
Abstract
A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.