The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Jul. 29, 2004
Applicants:
Kannan Balasubramanian, Navi Mumbai, IN;
Marko Burghard, Leonberg, DE;
Klaus Kern, Waldenbuch, DE;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 39/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a method of fabricating a structure with field-effect transistors each comprising a source electrode, a drain electrode, a channel extending between the source and drain electrodes and at least one gate electrode associated with the channel for controlling the conductance of the channel, wherein the channel comprises one or more semiconducting single-wall carbon nanotubes. The method includes the steps of