The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Jul. 29, 2004
Applicants:
Yoshio Kobayashi, Kanagawa, JP;
Masahiko Ichishima, Aichi, JP;
Yuu Yokoyama, Kanagawa, JP;
Inventors:
Assignee:
Toshiba Ceramics Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 15/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A plasma resistant member has a base material and a coating layer made of an YO, the coating layer being formed on a surface of the base material. The coating layer has a thickness of 10 μm or more and the YOof the coating layer contains solid solution Si ranging from 100 ppm to 1000 ppm.