The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 15, 2006

Filed:

Feb. 24, 2004
Applicants:

Zi-kui Liu, State College, PA (US);

Zhi-jie Liu, State College, PA (US);

Xiaoxing Xi, State College, PA (US);

Inventors:

Zi-Kui Liu, State College, PA (US);

Zhi-Jie Liu, State College, PA (US);

Xiaoxing Xi, State College, PA (US);

Assignee:

The Penn State Research Foundation, University Park, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); H01L 39/24 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Boride thin films of conducting and superconducting materials are formed on silicon by a process which combines physical vapor deposition with chemical vapor deposition. Embodiments include forming boride films, such as magnesium diboride, on silicon substrates by physically generating magnesium vapor in a deposition chamber and introducing a boron containing precursor into the chamber which combines with the magnesium vapor to form a thin boride film on the silicon substrates.


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