The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Jan. 23, 2001
Applicants:
Shigekazu Kato, Kudamatsu, JP;
Kouji Nishihata, Tokuyama, JP;
Tsunehiko Tsubone, Hikari, JP;
Atsushi Itou, Kadamatsu, JP;
Inventors:
Shigekazu Kato, Kudamatsu, JP;
Kouji Nishihata, Tokuyama, JP;
Tsunehiko Tsubone, Hikari, JP;
Atsushi Itou, Kadamatsu, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
F26R 13/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
A vacuum processing apparatus which includes a means for transferring substrates from a loader, with a transferring device, to a double lock chamber; and, then to a selected vacuum processing chamber. The substrates are returned to a substrate, by the vacuum loader, into their original position in the substrate table. The surfaces of the substrates are maintained in a horizontal position during processing.