The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2006
Filed:
Jan. 17, 2003
Philip R. Barros, San Jose, CA (US);
Raul A. Martin, Walnut Creek, CA (US);
Russell T. Norman, Hollister, CA (US);
Chris Melcer, Sunnyvale, CA (US);
Philip R. Barros, San Jose, CA (US);
Raul A. Martin, Walnut Creek, CA (US);
Russell T. Norman, Hollister, CA (US);
Chris Melcer, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
One embodiment of the present invention is a method for analyzing gas flow in a gas transmission unit of a gas panel that includes: (a) monitoring a measure of gas flow output from a mass flow controller included in the gas transmission unit; (b) monitoring a measure of gas pressure output from a pressure regulator included in the gas transmission unit; and (c) analyzing the measure of gas flow and the measure of gas pressure to determine whether gas flow is stable in the gas transmission unit.