The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2006
Filed:
Jan. 16, 2003
Applicant:
Anthony Dicarlo, Richardson, TX (US);
Inventor:
Anthony DiCarlo, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromirror arrayfabricated on a semiconductor substrate. The arrayis comprised of four operating layers. An addressing layeris fabricated on the substrate. A raised electrode layeris spaced above the addressing layer by an air gap. A hinge layeris spaced above the raised electrode layerby another air gap. A mirror layeris spaced over the hinge layerby a third air gap.