The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Apr. 19, 2002
Iraj Sadighi, Round Rock, TX (US);
Jeff Hudgens, San Francisco, CA (US);
Michael Rice, Pleasanton, CA (US);
Gary Wyka, Austin, TX (US);
Iraj Sadighi, Round Rock, TX (US);
Jeff Hudgens, San Francisco, CA (US);
Michael Rice, Pleasanton, CA (US);
Gary Wyka, Austin, TX (US);
Applied Material, Inc., Santa Clara, CA (US);
Abstract
Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.