The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Dec. 16, 2002
Timothy E. Cooper, Discovery Bay, CA (US);
Benjamin N. Eldridge, Danville, CA (US);
Carl V. Reynolds, Pleasanton, CA (US);
Ravindra Vaman Shenoy, Dublin, CA (US);
Timothy E. Cooper, Discovery Bay, CA (US);
Benjamin N. Eldridge, Danville, CA (US);
Carl V. Reynolds, Pleasanton, CA (US);
Ravindra Vaman Shenoy, Dublin, CA (US);
FormFactor, Inc., Livermore, CA (US);
Abstract
Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.