The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Oct. 02, 2003
Tsuneo Takashima, Tochigi, JP;
Tsuneo Takashima, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage base includes a magnetic body and has a slider guide surface defined by a groove. A portion of the slider that opposes the guide surface is provided with an air pad, whereby a hydrostatic bearing is formed. The slider is further provided with a pressurizing magnet for applying a magnetic attractive force between itself and the guide surface in a direction perpendicular to the guide surface. Displacement of the slider in a direction orthogonal to the travelling direction thereof is limited to a predetermined range using a magnetic attractive force, which is parallel to the guide surface, produced when at least a part of the pressurizing magnet deviates from the guide surface.