The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Jan. 10, 2005
Shinji Ohishi, Oyama, JP;
Shinji Ohishi, Oyama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An alignment stage apparatus including a base structure and a movable stage, which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switch unit configured to sequentially switch, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feed unit configured to supply AC power to the power transmission coils to be energized through the switch unit. The power reception coil includes a plurality of power reception coils arrayed in a driving direction of the movable stage, and the power reception coils and power transmission coils are phase-shifted from each other by 180°/n where n is the number of power reception coils arrayed in the driving direction of the movable stage.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile