The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Jun. 09, 2005
Roger Harquail French, Wilmington, DE (US);
Weiming Qiu, Wilmington, DE (US);
Sheng Peng, Wilmington, DE (US);
Roger Harquail French, Wilmington, DE (US);
Weiming Qiu, Wilmington, DE (US);
Sheng Peng, Wilmington, DE (US);
E. I du Pont de Nemours and Company, Wilmington, DE (US);
Abstract
Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.