The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Sep. 10, 2003
Applicant:
Raffaele Correale, Turin, IT;
Inventor:
Raffaele Correale, Turin, IT;
Assignee:
Varian S.p.A., Turin, IT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 17/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate () on which there are formed a single-layer or multilayer oscillating assembly () with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.
Quick Actions:
Correale, Raffaele. (2006). Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages (U.S. Patent No. 7083398). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7083398
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile