The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Jun. 16, 2003
Hideo Torii, Osaka, JP;
Eiji Fujii, Osaka, JP;
Atsushi Tomozawa, Osaka, JP;
Akiko Murata, Osaka, JP;
Ryoichi Takayama, Osaka, JP;
Taku Hirasawa, Kyoto, JP;
Hideo Torii, Osaka, JP;
Eiji Fujii, Osaka, JP;
Atsushi Tomozawa, Osaka, JP;
Akiko Murata, Osaka, JP;
Ryoichi Takayama, Osaka, JP;
Taku Hirasawa, Kyoto, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
In a piezoelectric element, a first electrode layermade of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate, and a piezoelectric layermade of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layerso that the piezoelectric layeris preferentially oriented along the (001) plane.