The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Aug. 13, 2003
Tsuneyuki Hagiwara, Tokyo, JP;
Hiromitsu Yoshimoto, Kumagaya, JP;
Hiroto Horikawa, Kumagaya, JP;
Hideo Mizutani, Yokohama, JP;
Tsuneyuki Hagiwara, Tokyo, JP;
Hiromitsu Yoshimoto, Kumagaya, JP;
Hiroto Horikawa, Kumagaya, JP;
Hideo Mizutani, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A reticle holderhas; a first suction sectionfacing a precision warrantable area ARhaving a predetermined surface precision, of a lower face Ra of a reticle R; a second suction sectionfacing a precision unwarrantable area ARoutside of the precision warrantable area AR; a poreconnected to a suction apparatus which draws out gas in a space between the lower face Ra of the reticle R and the first suction section, and a poreconnected to the suction apparatuswhich draws out gas in the space between the lower face Ra of the reticle R and the second suction section. As a result, the reticle can be held stably, without deteriorating the surface precision of the precision warrantable area.