The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Sep. 16, 2004
Applicant:
Yoshihiro Mushika, Neyagawa, JP;
Inventor:
Yoshihiro Mushika, Neyagawa, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/148 (2006.01); H01L 27/14 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microelectromechanical system includes a substrate, a transducer supported on the substrate and a conductor layer, which is also supported on the substrate and electrically connected to the transducer. The transducer includes a portion made of silicon or a silicon compound. The conductor layer is made of a refractory conductor, which includes, as its main ingredient, at least one element selected from the group consisting of copper, gold and silver. At least a portion of the conductor layer is located at an intermediate level between the silicon or silicon compound portion of the transducer and the substrate.