The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Mar. 12, 2004
Applicants:
Rahul Saini, Dallas, TX (US);
Zoran Jandric, Dallas, TX (US);
Inventors:
Rahul Saini, Dallas, TX (US);
Zoran Jandric, Dallas, TX (US);
Assignee:
Zyvex Corporation, Richardson, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 1/08 (2006.01); H01J 3/14 (2006.01); H01J 3/26 (2006.01); H01L 21/44 (2006.01); H05K 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microcolumn including an assembly substrate and a plurality of beam modification components. The assembly substrate includes a plurality of sockets, and the beam modification components each include a connector coupled to a corresponding one of the sockets. Assembly of the beam modification components to the assembly substrate may employ automation and/or automated calibration, including automated motion of robotic stages in a substantially automated manner.