The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Jun. 24, 2004
Kenji Hinode, Hachioji, JP;
Shuichi Nagasawa, Ryugasaki, JP;
Yoshihiro Kitagawa, Tsukuba, JP;
Mutsuo Hidaka, Tsukuba, JP;
Keiichi Tanabe, Mito, JP;
Kenji Hinode, Hachioji, JP;
Shuichi Nagasawa, Ryugasaki, JP;
Yoshihiro Kitagawa, Tsukuba, JP;
Mutsuo Hidaka, Tsukuba, JP;
Keiichi Tanabe, Mito, JP;
Hitachi, Ltd., Tokyo, JP;
NEC Corporation, Tokyo, JP;
International Superconductivity Technology Center, the Judicial Foundation, Tokyo, JP;
Abstract
To provide a planarization method which does not depend upon the size and the density of a wiring pattern and in which a reliable wiring system and a Josephson device can be formed and wiring structure, an insulation layer is planarized by forming a reversal pattern mask of wiring and selectively removing the insulation layer on the wiring.