The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Apr. 03, 2003
Koyata Takahashi, Sagamihara, JP;
Masanori Kohgo, Fujisawa, JP;
Koyata Takahashi, Sagamihara, JP;
Masanori Kohgo, Fujisawa, JP;
Tosoh Corporation, Yamaguchi, JP;
Abstract
Parts, especially those formed of quartz glass, for film-forming devices, plasma-treating devices and the like have a problem of inner pollution of the devices with particles given by dropping of deposit films from the parts, a problem of hermetical sealing reduction due to bonding failure of the parts to other parts, and a problem of energy efficiency reduction due to the heat insulation failure in the parts. Parts having a thermal sprayed quartz glass film formed on a substrate have an increased ability to hold a deposit thereon, and have an increased ability to hermetically bond to other parts. The parts having a thermal sprayed black quartz glass film have an increased ability of heat insulation property. Even when washed with acid, the abilities of the parts do not lower. The parts can be used for a long period of time and their life is long.