The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Apr. 09, 2004
Applicant:
Kazuki Fujimoto, Tochigi, JP;
Inventor:
Kazuki Fujimoto, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A gas flow measurement apparatus measures flow of gas emitted from an EUV light source in a light source chamber that accommodates the EUV light source, and includes an absorber that receives light emitted from the EUV light source and introduced into the gas flow measurement apparatus.