The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Dec. 05, 2002
Bodo Kühn, Hanau, DE;
Bruno Uebbing, Alzenau, DE;
Martin Trommer, Schlüchtern, DE;
Stefan Ochs, Bad Camberg, DE;
Stephan Thomas, Grosskrotzenburg, DE;
Steffen Kaiser, Hanau, DE;
Jan Vydra, Hanau, DE;
Bodo Kühn, Hanau, DE;
Bruno Uebbing, Alzenau, DE;
Martin Trommer, Schlüchtern, DE;
Stefan Ochs, Bad Camberg, DE;
Stephan Thomas, Grosskrotzenburg, DE;
Steffen Kaiser, Hanau, DE;
Jan Vydra, Hanau, DE;
Heraeus Quarzglas GmbH & Co. KG, Hanau, DE;
Abstract
The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties: In the use according to the invention, the quartz glass blank complies with dimensioning rules (2), (3), and (4) in terms of its minimal and maximal hydrogen contents and OH-content, C, C, and C, respectively, with P being the pulse number and ε being the energy density (in mJ/cm):[molecules/cm]=1×10ε,  (2)[molecules/cm]=2×10ε,  (3)[wt-ppm]=1,700×ε[mJ/cm]±50.  (4)The procedure according to the invention is characterized in that a mixed quartz glass is generated from a first and a second quartz glass by mixing the two quartz glasses in the course of a homogenization treatment.