The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Oct. 04, 2004
John Andrew Heilig, Santa Clara, CA (US);
Bahram Berj Kafai, Granada Hills, CA (US);
Glenn Sterling Trammell, Valencia, CA (US);
John Andrew Heilig, Santa Clara, CA (US);
Bahram Berj Kafai, Granada Hills, CA (US);
Glenn Sterling Trammell, Valencia, CA (US);
Baldor Electric Company, Fort Smith, AR (US);
Abstract
A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.