The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Jul. 17, 2003
Michael R. Stamp, Chandler, AZ (US);
Frederick J. Amrhein, Fountain Hills, AZ (US);
Arnold J. Dale, Mesa, AZ (US);
Joseph C. Pottebaum, Chandler, AZ (US);
Brian J. Ebert, Phoenix, AZ (US);
Michael R. Stamp, Chandler, AZ (US);
Frederick J. AmRhein, Fountain Hills, AZ (US);
Arnold J. Dale, Mesa, AZ (US);
Joseph C. Pottebaum, Chandler, AZ (US);
Brian J. Ebert, Phoenix, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.