The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Jan. 26, 2004
Michael R. Rice, Pleasanton, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Applied Material, Inc., Santa Clara, CA (US);
Abstract
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.