The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Jan. 19, 2004
Vladimir Yliy Gershtein, Allentown, PA (US);
Paul Anthony Mattiola, Coopersburg, PA (US);
John Frederick Cirucci, Schnecksville, PA (US);
John Christopher Ivankovits, Allentown, PA (US);
Vladimir Yliy Gershtein, Allentown, PA (US);
Paul Anthony Mattiola, Coopersburg, PA (US);
John Frederick Cirucci, Schnecksville, PA (US);
John Christopher Ivankovits, Allentown, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A system for the supply and delivery of a high or a ultrahigh purity (UHP) carbon dioxide product stream to at least one process tool within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of the following sub-systems: a carbon dioxide source, a carbon dioxide delivery system, and the point of use (POU) containing at least one process tool.