The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
May. 05, 2003
Jonathan W. Arenberg, Santa Monica, CA (US);
Jonathan W. Arenberg, Santa Monica, CA (US);
University of Central Florida Research Foundation, Orlando, FL (US);
Abstract
Collector optics () for an EUV radiation source () for collecting EUV radiation (). The collector optics () includes an elliptical dish reflector () where light generated at a focal point () of the reflector () is collected by the reflector () and is directed to a collection location (). A frustal annular reflector () is positioned around an outer edge () of the dish reflector () to collect more of the EUV radiation () that may otherwise be lost. The radiation () reflected by the annular reflector () is directed to a center axicon reflector () positioned between the focal point () of the dish reflector () and the collection location () to redirect the radiation () reflected by the annular reflector () to be within a predetermined collection angle.