The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
Oct. 06, 2004
Hideryo Matsudo, Saitama, JP;
Shigeto Yotuya, Saitama, JP;
Jun Katase, Saitama, JP;
Takahiro Ohtsuka, Saitama, JP;
Hideryo Matsudo, Saitama, JP;
Shigeto Yotuya, Saitama, JP;
Jun Katase, Saitama, JP;
Takahiro Ohtsuka, Saitama, JP;
Nihon Dempa Kogyo Co., Ltd., Tokyo, JP;
Abstract
The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm. The tuning fork shaped crystal element is formed from a single crystal wafer by a photo-etching technique, and the side face of the tuning fork arm on which the first and second sensor electrodes are formed is a +X face of the crystal, and the first and second sensor electrodes are arranged on both sides of a protrusion ridge line section on the +X face that occurs in the lengthwise direction of the side face due to crystallinity of the crystal.