The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
May. 09, 2002
Vittorio Foglietti, Rome, IT;
Elena Cianci, Rome, IT;
Daniele Memmi, Rome, IT;
Giosué Caliano, Rome, IT;
Massimo Pappalardo, Rome, IT;
Vittorio Foglietti, Rome, IT;
Elena Cianci, Rome, IT;
Daniele Memmi, Rome, IT;
Giosué Caliano, Rome, IT;
Massimo Pappalardo, Rome, IT;
Consiglio Nazionale Delle Ricerche, Rome, IT;
Esaote S.p.A., Casale Monferrato, IT;
Universita' Degli Studi-Roma Tre, Rome, IT;
Abstract
A surface micromachining process for manufacturing Electro-acoustic transducers, particularly ultrasonic transducers, the transducers comprising a silicon semiconductor substrate (), on an upper surface of which one or more membranes () of resilient materials are supported by a structural layer () of insulating material, rigidly connected to the semiconductor substrate (), the resilient material having a Young's modulus not lower than 50 GPa, the membranes () being metallised, the transducers including one or more lower electrodes (), rigidly connected to the semiconductor substrate. The process is characterised in that the structural layer () includes silicon monoxide. The invention further relates to an Electro-acoustic transducer, particularly an ultrasonic transducer, characterised in that the insulating material of the structural layer () is silicon monoxide. The invention also relates to an intermediate product for utilisation in the process for realising Electro-acoustic transducers, particularly ultrasonic transducers.