The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
May. 05, 2005
Applicant:
Srinivasan K. Ganapathi, Fremont, CA (US);
Inventor:
Srinivasan K. Ganapathi, Fremont, CA (US);
Assignee:
Fidelica Microsystems, Inc., Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides an apparatus for sensing pressure that comprises a substrate and a sensor formed on the substrate. The sensor is adapted to sense pressure applied thereto and includes a support structure smaller than the substrate to result in a cavity above a portion of the substrate and a magnetoresistive sensor formed over the support structure. The magnetoresistive element provides high sensitivity to pressure while maintaining miniaturized dimensions.