The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Nov. 03, 2003
Jun Yan, Cincinnati, OH (US);
Vincenzo Casasanta, Iii, Woodinville, WA (US);
Selso H. Luanava, Woodinville, WA (US);
Hakan Urey, Istanbul, TR;
Frank A. Dewitt, Iv, Bloomfield, NY (US);
Clarence T. Tegreene, Bellevue, WA (US);
Christopher A. Wiklof, Everett, WA (US);
Jun Yan, Cincinnati, OH (US);
Vincenzo Casasanta, III, Woodinville, WA (US);
Selso H. Luanava, Woodinville, WA (US);
Hakan Urey, Istanbul, TR;
Frank A. DeWitt, IV, Bloomfield, NY (US);
Clarence T. Tegreene, Bellevue, WA (US);
Christopher A. Wiklof, Everett, WA (US);
Microvision, Inc., Redmond, WA (US);
Abstract
A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure, the capacitive drive comes from interleaved combs. In another approach, a comb drive combines with a pair of planar electrodes to produce rotation of a central body relative to a substrate. In an optical scanning application, the central body is a mirror. In a biaxial structure, a gimbal ring carries the central body. The gimbal ring may be driven by more than one type of actuation to produce motion about an axis orthogonal to that of the central body. In another aspect, a MEMS scanning device is constructed with a reduced footprint.