The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Sep. 24, 2003
Sebastian Schmidt, Dresden, DE;
Thomas Schafbauer, Paris, FR;
Hang Yip Liu, Montrose, NY (US);
Yayi Wei, Altamont, NY (US);
Sebastian Schmidt, Dresden, DE;
Thomas Schafbauer, Paris, FR;
Hang Yip Liu, Montrose, NY (US);
Yayi Wei, Altamont, NY (US);
Infineon Technologies AG, Munich, DE;
Abstract
A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.