The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Jul. 20, 1999
Robert W Eason, Southampton, GB;
Ian E Barry, Southampton, GB;
Peter G R Smith, Southampton, GB;
Graeme W Ross, Southampton, GB;
Robert W Eason, Southampton, GB;
Ian E Barry, Southampton, GB;
Peter G R Smith, Southampton, GB;
Graeme W Ross, Southampton, GB;
QinetiQ Limited, London, GB;
Abstract
A method of selectively etching a substrate () comprises applying etchant () at a surface of the substrate and illuminating an area of the surface with light from a light source (), whereby etching is at least partially inhibited in the illuminated area () of the substrate. Preferably LiNbO3 is patterned in HF KOH, or HF═HNO3 solutions by selective illumination using UV laser light with 300 to 1000 mn wavelength, thereby allowing for interferometric or holographic structures to be formed.