The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2006
Filed:
Nov. 26, 2002
Yoshihiro Mushika, Neyagawa, JP;
Yoshihiro Mushika, Neyagawa, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A deformable mirror according to the present invention includes a substrate, a plurality of micromirrors, which are supported by the substratewhile being segmented from each other, and a plurality of driving sections, which drive the micromirrorsindependently of each other. Each of the driving sections includes a number of fixed electrodesto, and the same number of movable electrodesto, which are provided so as to face the fixed electrodesto. Each of the micromirrorsis coupled to at least two of the movable electrodesto, which are associated with the micromirrorThe deformable mirror can displace each micromirrorperpendicularly to the substrateand/or tilt the micromirrorwith respect to the substrate.