The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2006
Filed:
Sep. 03, 2003
Surface acoustic wave device, filter device and method of producing the surface acoustic wave device
Applicants:
Masahiko Imai, Kawasaki, JP;
Michio Miura, Kawasaki, JP;
Takashi Matsuda, Kawasaki, JP;
Masanori Ueda, Kawasaki, JP;
Osamu Ikata, Yokohama, JP;
Inventors:
Masahiko Imai, Kawasaki, JP;
Michio Miura, Kawasaki, JP;
Takashi Matsuda, Kawasaki, JP;
Masanori Ueda, Kawasaki, JP;
Osamu Ikata, Yokohama, JP;
Assignees:
Fujitsu Media Devices Limited, Yokohama, JP;
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/25 (2006.01);
U.S. Cl.
CPC ...
Abstract
A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.