The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2006
Filed:
Nov. 06, 2003
Applicants:
Patricia B. Smith, Colleyville, TX (US);
Phillip D. Matz, McKinney, TX (US);
Inventors:
Patricia B. Smith, Colleyville, TX (US);
Phillip D. Matz, McKinney, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process for removing resist () from a CDO dielectric material () that uses a non-damaging plasma in a reducing atmosphere under high power and using a structure () or other means to limit ions from the plasma from reaching the surface of the CDO material ().