The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2006
Filed:
Mar. 01, 2002
Anthony C. Bonora, Woodside, CA (US);
Richard H. Gould, Fremont, CA (US);
Roger G. Hine, San Carlos, CA (US);
Michael Krolak, Los Gatos, CA (US);
Jerry A. Speasl, Pleasanton, CA (US);
Anthony C. Bonora, Woodside, CA (US);
Richard H. Gould, Fremont, CA (US);
Roger G. Hine, San Carlos, CA (US);
Michael Krolak, Los Gatos, CA (US);
Jerry A. Speasl, Pleasanton, CA (US);
Asyst Technologies, Inc., Fremont, CA (US);
Abstract
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.