The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Mar. 21, 2003
Hisashi Isozaki, Tokyo-to, JP;
Michihiro Yamazaki, Tokyo-to, JP;
Hiroshi Yoshikawa, Tokyo-to, JP;
Naoto Miki, Tokyo-to, JP;
Hiroyuki Maekawa, Tokyo-to, JP;
Naohiro Takahashi, Kawasaki, JP;
Hisashi Isozaki, Tokyo-to, JP;
Michihiro Yamazaki, Tokyo-to, JP;
Hiroshi Yoshikawa, Tokyo-to, JP;
Naoto Miki, Tokyo-to, JP;
Hiroyuki Maekawa, Tokyo-to, JP;
Naohiro Takahashi, Kawasaki, JP;
Kabushiki Kaisha TOPCON, Tokyo-to, JP;
Abstract
A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are coated by changing a photodetection polarizing angle by the photodetection polarizing angle changing means, and the step of performing surface inspection by setting the photodetection polarizing angle to a condition where an S/N ratio of photodetection output is at the highest.