The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2006

Filed:

Nov. 23, 2004
Applicants:

Masahiko Ishiguri, Kawasaki, JP;

Hirohisa Matsuki, Kawasaki, JP;

Hiroyuki Yoda, Kawasaki, JP;

Tadahiro Okamoto, Kawasaki, JP;

Masamitsu Ikumo, Kawasaki, JP;

Shuichi Chiba, Sagamihara, JP;

Inventors:

Masahiko Ishiguri, Kawasaki, JP;

Hirohisa Matsuki, Kawasaki, JP;

Hiroyuki Yoda, Kawasaki, JP;

Tadahiro Okamoto, Kawasaki, JP;

Masamitsu Ikumo, Kawasaki, JP;

Shuichi Chiba, Sagamihara, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/52 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device includes a semiconductor substrate and an array of protruding electrodes arranged at a pitch X. Each of the protruding electrodes has a height Xand is formed on a barrier metal base of diameter Xcoupled to an electrode arranged on the semiconductor substrate so as to satisfy the relations (X/2)≦X(3*X/4) and (X/2)≦X(3*X/4).


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