The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Dec. 05, 2002
Applicants:
Bodo Kühn, Hanau, DE;
Bruno Uebbing, Alzenau, DE;
Inventors:
Bodo Kühn, Hanau, DE;
Bruno Uebbing, Alzenau, DE;
Assignee:
Heraeus Quarzglas GmbH & co., Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 3/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention concerns a quartz glass blank for an optical component for the transmission of ultraviolet radiation of a wave length of 250 nm and under, as well as its utilization in microlithography in connection with ultraviolet radiation of a wavelength of 250 nm and under. Such quartz glass blank is to have low induced absorption, while being optimized in respect of compaction and de-compaction. The quartz glass blank according to the invention has the following properties: