The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Dec. 02, 2003
Alessio M. D'arrigo Guiseppe, Sant' Agata li Battiati, IT;
Rosario C. Spinella, Catania, IT;
Guiseppe Arena, Catania, IT;
Simona Lorenti, Catania, IT;
Alessio M. D'arrigo Guiseppe, Sant' Agata li Battiati, IT;
Rosario C. Spinella, Catania, IT;
Guiseppe Arena, Catania, IT;
Simona Lorenti, Catania, IT;
STMicroelectronics S.r.l., , IT;
Abstract
A process is presented for realizing buried microchannels () in an integrated structure () comprising a monocrystalline silicon substrate (). The process forms in the substrate () at least one trench (). A microchannel () is obtained starting from a small surface port of the trench () by anisotropic etching of the trench. The microchannel () is then completely buried in the substrate () by growing a microcrystalline structure to enclose the small surface port.