The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Oct. 08, 2003
Eugenia Atakov, Acton, MA (US);
Adam Shepela, Bolton, MA (US);
Lawrence Bair, Littleton, MA (US);
John Clement, Westboro, MA (US);
Bruce Gieseke, Ashland, MA (US);
Eugenia Atakov, Acton, MA (US);
Adam Shepela, Bolton, MA (US);
Lawrence Bair, Littleton, MA (US);
John Clement, Westboro, MA (US);
Bruce Gieseke, Ashland, MA (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A method of forming an electrical conductor, comprising forming electrically conductive segments incorporating electromigration-inhibiting plugs. A row of windows is formed in a planar surface and electromigraation-inhibiting material is deposited over the planar surface and into the windows to provide electromigration-inhibiting plugs in the windows. The plugs may be formed by depositing an electromigration-inhibiting liner in the windows and then depositing electrically conductive material to fill the windows. Portions of either or both of the plugs and conductive segments are removed such that the plugs and conductive segments have a coplanar surface. The plugs may be formed in windows in an electrically conductive layer defining the conductive segments. Embodiments of the method may be employed in manufacture of integrated circuit conductor.