The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Sep. 27, 2002
Kazunori Kawasaki, Tokyo, JP;
Hiroaki Asahi, Tokyo, JP;
Shoji Muramatsu, Tokyo, JP;
Tetsuya Takada, Tokyo, JP;
Kazunori Kawasaki, Tokyo, JP;
Hiroaki Asahi, Tokyo, JP;
Shoji Muramatsu, Tokyo, JP;
Tetsuya Takada, Tokyo, JP;
IHI Aerospace Co., Ltd., Tokyo, JP;
Abstract
An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.