The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Jul. 26, 2005
Hsiu-wen Hsu, Hsinchu, TW;
Hsiu-Wen Hsu, Hsinchu, TW;
Episil Technologies Inc., Hsinchu, TW;
Abstract
A method for fabricating trench power MOSFET is described. An epitaxial layer and a mask layer having a first opening are sequentially formed on a substrate. A pair of spacers is formed on the sidewalls of the first opening. A second opening exposing the surface of the epitaxial layer is formed by removing a portion of the mask layer. The spacers are removed and then a trench is formed in the epitaxial layer using the mask layer as a mask. The mask layer is removed and a gate oxide layer is formed over the epitaxial layer and the surface of the trench. A gate layer is formed to fill the trench. A body well region is formed in the epitaxial layer adjacent to the sidewalls of the trench. A source region is formed in the body well region on each side at the top of the trench.