The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7060323 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 13, 2006

Filed:

Mar. 28, 2003
Applicants:

Gaku Sugahara, Nara, JP;

Nobuo Aoi, Hyogo, JP;

Koji Arai, Osaka, JP;

Kazuyuki Sawada, Osaka, JP;

Inventors:

Gaku Sugahara, Nara, JP;

Nobuo Aoi, Hyogo, JP;

Koji Arai, Osaka, JP;

Kazuyuki Sawada, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); C23C 16/42 (2006.01); C23C 16/40 (2006.01); C23C 16/509 (2006.01); H01L 21/473 (2006.01);
U.S. Cl.
CPC ...
Abstract

A material containing, as a main component, an organic silicon compound represented by the following general formula:RSi(OR)(where Ris a phenyl group or a vinyl group; Ris an alkyl group; and x is an integer of 1 to 3) is caused to undergo plasma polymerization or react with an oxidizing agent to form an interlayer insulating film composed of a silicon oxide film containing an organic component. As the organic silicon compound where Ris a phenyl group, there can be listed phenyltrimethoxysilane or diphenyldimethoxysilane. As the organic silicon compound where Ris a vinyl group, there can be listed vinyltrimethoxysilane or divinyldimethoxysilane.


Find Patent Forward Citations

Sugahara, Gaku. (2006). Method of forming interlayer insulating film (U.S. Patent No. 7060323). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7060323

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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