The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Oct. 22, 2004
Raffaele Correale, Turin, IT;
Cristian Maccarrone, Turin, IT;
Mario Busso, Mappano di Caselle T.se, IT;
Raffaele Correale, Turin, IT;
Cristian Maccarrone, Turin, IT;
Mario Busso, Mappano di Caselle T.se, IT;
Varian S.p.A., Turin, IT;
Abstract
A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (') onto which a single-layer or multilayer vibrating assembly () is formed. It comprises an electrode (′), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.