The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2006
Filed:
Jun. 30, 2003
Applicants:
Joseph C. Marron, Ann Arbor, MI (US);
Dean Faklis, Bloomfield, NY (US);
Inventors:
Joseph C. Marron, Ann Arbor, MI (US);
Dean Faklis, Bloomfield, NY (US);
Assignee:
Lightgage, Inc., Bloomfield, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A frequency-scanning interferometer is modified to include a diffuse reference surface. An illuminating system produces an expanding measuring beam, portions of which reflect from a test object surface and the diffuse reference surface on converging paths to an imaging system. Interference patterns between overlapping images of the object and reference surfaces are generated at a plurality of frequencies for measuring the object surface with respect to the reference surface.