The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2006
Filed:
Aug. 05, 2005
Akito Kishida, Tokyo, JP;
Akito Kishida, Tokyo, JP;
Agilent Technologies, Inc., Palo Alto, CA (US);
Abstract
A prober includes a frame having a frame ground terminal, a chuck stage, servo motors for driving the chuck stage, servo amplifiers connected to the servo motors, first floating mounts on which the servo amplifiers are provided, a second floating mount on which the servo motor is provided. The first floating mounts are electrically insulated from the frame and have first ground terminals connected to the ground terminals of the servo amplifiers. The second floating mount is electrically insulated from the frame and has a second ground terminal connected to the ground terminal of the servo motor. The prober further includes shielded cables connecting the servo amplifiers and the servo motors, a first wire connecting the first ground terminal and the frame ground terminal and also connecting the first ground terminal and the second floating mount, and second wires connecting the shielded cables and the frame ground terminal.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile